Disc (target) with deposition material, consisting of molybdenum silicide
According to the invention, the emitting body (15) is made from a heat-resistant material comprising more than 50 wt. % of a metal silicide, preferably molybdenum silicide (MoSi2) or tungsten silicide (WSi2).
Typical examples of the intermetallic compound are silicides with a high melting point, such as titanium silicide, molybdenum silicide, and tungsten silicide.
The present invention relates to a method of producing a heating element that is comprised essentially of molybdenum silicide and alloys of this basic material.
The present invention relates to a method for the production of a heating element that is comprised essentially of molybdenum silicide and alloys of this basic material.
Molybden silicide material with high strength at both room temperature and high temperatures, comprising a composite material, which is manufactured of a mixture including MoSi2 and ZrO2.