The present invention relates to an electron cyclotron resonance (ECR) ion source apparatus and to a method for boosting extraction current.
With the variable ion guide, an electron cyclotron resonance (ECR) ion source can be configured by including the variable ion guide, a plasma chamber, a magnet unit, and a microwave generating unit.
The source is, for example, an electron cyclotron resonance (RCE) source.
The thruster ionizes the gas by electron cyclotron resonance, and subsequently accelerates both electrons and ions by the magnetized ponderomotive force.
The apparatus comprises an independent first (ECRIS 1) and an independent second electron cyclotron resonance ion source (ECRIS 2) for generating heavy and light ions, respectively.
Microwave energy is introduced into the gas within the enclosure to produce a plasma therein by distribution electron cyclotron resonance, and cause material to be deposited from the plasma on the substrate.
Microwave energy is introduced into the gas within the enclosure to produce a plasma therein by distributed electron cyclotron resonance (DECR) and cause material to be deposited from the plasma on the substrate.
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