A microelectromechanical system package (10) has a micro-electromechanical system microphone, a substrate (14), and a cover (20).
The system further includes a frame surrounding the microelectromechanical structure, and a plurality of springs each coupled to the microelectromechanical structure and to the frame.
A method is provided for making a microelectromechanical device with high aspect ratio features.
A MEMS (Microelectromechanical system) device is described.
The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element.
A micro-electromechanical actuator (128) is connected to the drive circuitry.
A method of making a micro electro-mechanical gyroscope.
The present invention relates to an optic seismic MEMS sensor.
A micro-electro-mechanical system varactor.
In various embodiments, the electromechanical resonator can be a micro-electromechanical system (MEMS) resonator or a nano-electromechanical system (NEMS) resonator.
The micro-electromechanical system can be embodied as an electrostatically operated micro-switch with improved switching.
A micro-electromechanical relay ('micro-relay') designed to both miniaturize and improve upon present day electromechanical relays.
Micro electro-mechanical system (MEMS) devices for harvesting energy are provided.
The MEMS components on the MEMS die are hermetically sealed, such as by bonding a cover to the upper package body or the lower package body.
A moveable micro-electromechanical valve is positioned to contact the fluid flow outlet port when the moveable micro-electromechanical valve is in a first position.
A micro-electromechanical (MEM) switch capable of inductively coupling and decoupling electrical signals is described.
A micro-electromechanical actuator (14) is connected to the CMOS drive circuitry layer.
A method (72) for coating (42) a micro-electromechanical system (MEMS) device is provided.
A method of making a micro electo-mechanical switch or tunneling sensor.
A method of making a micro electro-mechanical switch or tunneling sensor.
A three axis MEM tunneling/capacitive sensor and method of making same.
The at least one droplet generator may comprise at least one micro-electomechanical (MEMs) pump.
The substrate (14) has a surface for supporting the micro-electromechanical microphone.
A MEMS device (400) and method of making same is disclosed.