A sensor (11) reads information of the hand by scanning the hand in a scanning direction (D1).
Furthermore, in the case of changing the scanning direction of the electron beam in accordance with the pattern direction, errors of the scanning direction and the scanning position are corrected.
The diffraction element is disposed at such an angle that the projection of the diffraction direction on the diffraction element may be nearly 45˚ relative to the scanning direction of a scanning section.
The case (20) is provided with two positioning means (71)for preventing the shift of the main scanning direction (N1) relative to the bracket (6), these positioning means being spaced from each other in the main scanning direction (N1).
The scanning exposure apparatus has, above a substrate (1) to be exposed, a plurality of microlens arrays (2) supported by a supporting substrate by being arranged in the direction perpendicular to the scanning direction.
The laser beam is scanned across the receiving surface in a scan direction (66) perpendicular to a process direction (46).
The first region and the second region are arranged at a predetermined interval along the non-scan direction intersecting the scan direction.
The MEMS mirror (30) performs one frame of scans during the interval when the scan in the subsidiary scan direction drives in one direction.
The specimen is dynamically tiltable about a scan direction during a scan to maintain focus along the length of each scan line as the scan proceeds.
Means for differentially varying the focussing in the scan direction (53, 55) and offset at the beams in the cross-scan direction (49, 51) are also provided.
The light beams are simultaneously applied to two locations of the sample different in scan direction by means of a galvanometer mirror (18), and the sample is scanned in the scan direction.
By this means, this scanning exposure device using a microlens array is capable of preventing exposure unevenness even in the direction perpendicular to the scan direction.
An encoder scale is arranged along the main scan direction.