In this method, an MEMS device can be packaged in vacuum using a simple process without causing outgassing and leakage from a cavity of the upper substrate.
The probe also displays low outgassing and high mechanical and chemical stability, thereby enabling it to be used repetitively.
The tank ventilating valve (2) is controlled and/or regulated according to a tank outgassing model (10) and/or to an activated carbon filter model (10).
A low out-gassing polyurethane is described for use in applications where contaminants must be kept to very low levels, such as during lithography.
Testing of the novel polyurethane formulation shows the off-gassing characteristics to be much lower than commercially available potting materials made from polyethylene.